Inventor
KOGUCHI AKIRA
JP4 patents
Patents
4 patentsUS6009890AJan 4, 2000
Substrate transporting and processing system
TOKYO ELECTRON LTD75 citations96
US6269552B1Aug 7, 2001
Method of drying substrates and drying apparatus
TOKYO ELECTRON LTD44 citations92
US6612801B1Sep 2, 2003
Method and device for arraying substrates and processing apparatus thereof
TOKYO ELECTRON LTD50 citations89
US6821073B1Nov 23, 2004
Container handling system for substrate processing apparatus and method of handling containers
TOKYO ELECTRON LTD12 citations70