Inventor
MISAWA HISANORI
JP6 patents
Patents
6 patentsUS7282725B2Oct 16, 2007
Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask
TOSHIBA KK17 citations91
US7094612B2Aug 22, 2006
Method of controlling a potential difference between a stencil mask and a substrate of semiconductor device
TOSHIBA KK14 citations83
US5179433AJan 12, 1993
Breakdown evaluating test element
TOSHIBA KK12 citations70
US4783597ANov 8, 1988
Ion implant apparatus
TOSHIBA KK16 citations70
US7339247B2Mar 4, 2008
Semiconductor device manufacturing method and semiconductor manufacturing apparatus
TOSHIBA KK0 citations51
US7034318B2Apr 25, 2006
Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and stencil mask
TOSHIBA KK1 citations51