Inventor
SCHLUCHTER W CLAY
US3 patents
Patents
3 patentsUS7158236B2Jan 2, 2007
Heterodyne laser interferometer for measuring wafer stage translation
AGILENT TECHNOLOGIES INC9 citations66
US7280275B2Oct 9, 2007
High efficiency beam distribution with independent wavefront correction
AGILENT TECHNOLOGIES INC4 citations55
US7420744B2Sep 2, 2008
Ambient environment index of refraction insensitive optical system
AGILENT TECHNOLOGIES INC0 citations48