P

Inventor

KOBAYASHI YASUO

60 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI YASUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

16 patents
US5698036ADec 16, 1997

Plasma processing apparatus

TOKYO ELECTRON LTD502 citations99
US5334302AAug 2, 1994

Magnetron sputtering apparatus and sputtering gun for use in the same

TOKYO ELECTRON LTD119 citations97
US6706334B1Mar 16, 2004

Processing method and apparatus for removing oxide film

TOKYO ELECTRON LTD95 citations96
US6776874B2Aug 17, 2004

Processing method and apparatus for removing oxide film

TOKYO ELECTRON LTD52 citations95
US5851600ADec 22, 1998

Plasma process method and apparatus

TOKYO ELECTRON LTD35 citations93
US6537621B1Mar 25, 2003

Method of forming a titanium film and a barrier film on a surface of a substrate through lamination

TOKYO ELECTRON LTD20 citations92
US6051281AApr 18, 2000

Method of forming a titanium film and a barrier metal film on a surface of a substrate through lamination

TOKYO ELECTRON LTD33 citations92
US7897205B2Mar 1, 2011

Film forming method and film forming apparatus

TOKYO ELECTRON LTD7 citations84
US7803705B2Sep 28, 2010

Manufacturing method of semiconductor device and film deposition system

TOKYO ELECTRON LTD8 citations84
US6322662B1Nov 27, 2001

Plasma treatment system

TOKYO ELECTRON LTD19 citations84
US7146744B2Dec 12, 2006

Method and apparatus for surface treatment

TOKYO ELECTRON LTD9 citations74
US7094703B2Aug 22, 2006

Method and apparatus for surface treatment

TOKYO ELECTRON LTD7 citations74
US6197674B1Mar 6, 2001

CVD-Ti film forming method

TOKYO ELECTRON LTD12 citations74
US10438791B2Oct 8, 2019

Film forming method, film forming apparatus, and storage medium

TOKYO ELECTRON LTD2 citations71
US7776736B2Aug 17, 2010

Substrate for electronic device capable of suppressing fluorine atoms exposed at the surface of insulating film from reacting with water and method for processing same

TOKYO ELECTRON LTD3 citations63
US10388557B2Aug 20, 2019

Placing bed structure, treating apparatus using the structure, and method for using the apparatus

TOKYO ELECTRON LTD1 citations62

NEC CORP

12 patents

FUJITSU LTD

3 patents

FUJI ELECTRIC CO LTD

3 patents

KOBAYASHI YASUO

2 patents

HITACHI LTD

2 patents

TOMOEGAWA PAPER CO LTD

2 patents

TECHNICAL ASSOCIATE CO LTD

1 patent

OHMI TADAHIRO

1 patent

TOYOTA MOTOR CO LTD

1 patent

YAZAKI CORP

1 patent

NIPPON KOKAN KK

1 patent

MITSUBISHI ALUMINIUM KABUSHIKI

1 patent

KAWAMURA KOHEI

1 patent

ISHIKAWAJIMA HARIMA HEAVY IND

1 patent

TAMURA ELECTRIC WORKS LTD

1 patent

ASAHI GLASS CO LTD

1 patent

Showing the top 50 of 60 patents by PatentIndex Score.