Inventor
FEURPRIER YANNICK
US16 patents
⚠️ This page may combine multiple inventors who share the name “FEURPRIER YANNICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS8809185B1Aug 19, 2014
Dry etching method for metallization pattern profiling
TOKYO ELECTRON LTD14 citations83
US7723237B2May 25, 2010
Method for selective removal of damaged multi-stack bilayer films
TOKYO ELECTRON LTD12 citations82
US7637269B1Dec 29, 2009
Low damage method for ashing a substrate using CO2/CO-based process
TOKYO ELECTRON LTD17 citations80
US9818610B2Nov 14, 2017
Trench and hole patterning with EUV resists using dual frequency capacitively coupled plasma (CCP)
TOKYO ELECTRON LTD4 citations70
US9607834B2Mar 28, 2017
Trench and hole patterning with EUV resists using dual frequency capacitively coupled plasma (CCP)
TOKYO ELECTRON LTD5 citations70
US7947609B2May 24, 2011
Method for etching low-k material using an oxide hard mask
TOKYO ELECTRON LTD6 citations62
US7935640B2May 3, 2011
Method for forming a damascene structure
TOKYO ELECTRON LTD4 citations62
US11495490B2Nov 8, 2022
Semiconductor device manufacturing method
TOKYO ELECTRON LTD0 citations59
US10910259B2Feb 2, 2021
Semiconductor device manufacturing method
TOKYO ELECTRON LTD0 citations59
US11087973B2Aug 10, 2021
Method of selective deposition for BEOL dielectric etch
TOKYO ELECTRON LTD0 citations58
US12438038B2Oct 7, 2025
Forming vias in a semiconductor device
TOKYO ELECTRON LTD0 citations44