Inventor

UTZNY CLEMENS

DE2 patents

⚠️ This page may combine multiple inventors who share the name “UTZNY CLEMENS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MASK TECHNOLOGY CT GMBH & CO KG

1 patent

US8932785B2Jan 13, 2015

EUV mask set and methods of manufacturing EUV masks and integrated circuits

ADVANCED MASK TECHNOLOGY CT GMBH & CO KG36 citations82

ADVANCED MASK TECH CENTER GMBH & CO KG

1 patent

US9405185B2Aug 2, 2016

Shape metrology for photomasks

ADVANCED MASK TECH CENTER GMBH & CO KG0 citations38