Inventor
TIEN DAVID
US9 patents
⚠️ This page may combine multiple inventors who share the name “TIEN DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS9476838B2Oct 25, 2016
Hybrid imaging and scatterometry targets
KLA TENCOR CORP5 citations71
US10095121B2Oct 9, 2018
Optimizing the utilization of metrology tools
KLA TENCOR CORP5 citations69
US9466100B2Oct 11, 2016
Focus monitoring method using asymmetry embedded imaging target
KLA TENCOR CORP2 citations56
US10725385B2Jul 28, 2020
Optimizing the utilization of metrology tools
KLA TENCOR CORP0 citations48
US9291920B2Mar 22, 2016
Focus recipe determination for a lithographic scanner
KLA TENCOR CORP0 citations42
CHOI DONGSUB
3 patentsUS10295993B2May 21, 2019
Method and system for detecting and correcting problematic advanced process control parameters
CHOI DONGSUB14 citations83
US9709903B2Jul 18, 2017
Overlay target geometry for measuring multiple pitches
CHOI DONGSUB15 citations82
US8655469B2Feb 18, 2014
Advanced process control optimization
CHOI DONGSUB4 citations71