Inventor · disambiguated record

Yuri Vainer

Also filed as: VAINER YURI

1 granted patent·0 citations·filing 2011–2011

10Inventor score

Technology areasG03F

Files withVAINER YURI1

Top patents by PatentIndex Score

1 record

0136US9488922B2Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devicesVAINER YURI·Filed 2011·Granted Nov 8, 2016·0 cites·20 claims

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