Inventor

KUSABIRAKI KAZUNORI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “KUSABIRAKI KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

4 patents

US9268225B2Feb 23, 2016

Composition, resist pattern-forming method, compound, method for production of compound, and polymer

JSR CORP2 citations60

US9926462B2Mar 27, 2018

Composition for forming liquid immersion upper layer film, and polymer

JSR CORP0 citations49

US9540535B2Jan 10, 2017

Composition for forming liquid immersion upper layer film, and polymer

JSR CORP0 citations49

US9046775B2Jun 2, 2015

Composition for forming liquid immersion upper layer film, resist pattern-forming method, polymer, and compound

JSR CORP0 citations39

HAYAMA TAKAHIRO

1 patent

US9261789B2Feb 16, 2016

Liquid immersion lithography upper-layer film-forming composition and photoresist pattern-forming method

HAYAMA TAKAHIRO1 citations44

KUSABIRAKI KAZUNORI

1 patent

US8501389B2Aug 6, 2013

Upper layer-forming composition and resist patterning method

KUSABIRAKI KAZUNORI0 citations31