Inventor · disambiguated record

Hanns Peter Petsch

Also filed as: PETSCH HANNS PETER

1 granted patent·9 citations·filing 2018–2018

31Inventor score

Technology areasH01J

Files withIMS NANOFABRICATION GMBH1

Top patents by PatentIndex Score

1 record

0187US10325757B2Advanced dose-level quantization of multibeam-writersIMS NANOFABRICATION GMBH·Filed 2018·Granted Jun 18, 2019·9 cites·10 claims

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