Inventor
KIM GYEONGSEOP
KR5 patents
Patents
5 patentsUS10991692B2Apr 27, 2021
Semiconductor device having a plurality of fins and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD2 citations69
US10566207B2Feb 18, 2020
Semiconductor manufacturing methods for patterning line patterns to have reduced length variation
SAMSUNG ELECTRONICS CO LTD2 citations67
US10643998B2May 5, 2020
Semiconductor device having first and second fin-type patterns and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US10475789B2Nov 12, 2019
Semiconductor device having first and second fin-type patterns and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US10748821B2Aug 18, 2020
Method and system for measuring pattern placement error on a wafer
SAMSUNG ELECTRONICS CO LTD0 citations35