Inventor
LUNDY NICOLE
US5 patents
Patents
5 patentsUS10431493B2Oct 1, 2019
Doping control of metal nitride films
APPLIED MATERIALS INC5 citations82
US10008412B2Jun 26, 2018
Doping control of metal nitride films
APPLIED MATERIALS INC2 citations71
US9659814B2May 23, 2017
Doping control of metal nitride films
APPLIED MATERIALS INC2 citations71
US11587829B2Feb 21, 2023
Doping control of metal nitride films
APPLIED MATERIALS INC0 citations61
US10910263B2Feb 2, 2021
Doping control of metal nitride films
APPLIED MATERIALS INC0 citations61