Inventor
WU JIANN LIH
TW9 patents
⚠️ This page may combine multiple inventors who share the name “WU JIANN LIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS10065288B2Sep 4, 2018
Chemical mechanical polishing (CMP) platform for local profile control
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US10513006B2Dec 24, 2019
High throughput CMP platform
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations71
US10090207B2Oct 2, 2018
Multi-point chemical mechanical polishing end point detection system and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11999027B2Jun 4, 2024
Method for polishing semiconductor substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11772227B2Oct 3, 2023
Device and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11602821B2Mar 14, 2023
Wafer polishing head, system thereof, and method using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10875143B2Dec 29, 2020
Apparatus and methods for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40