Inventor
YOSHIHARA Mai
JP4 patents
Patents
4 patentsUS11239051B2Feb 1, 2022
Charged particle beam device
HITACHI HIGH TECH CORP4 citations67
US12368017B2Jul 22, 2025
Charged particle beam apparatus and focus adjusting method therefor
HITACHI HIGH TECH CORP0 citations58
US12525423B2Jan 13, 2026
Charged particle beam device
HITACHI HIGH TECH CORP0 citations45
US12283458B2Apr 22, 2025
Charged particle beam device
HITACHI HIGH TECH CORP0 citations44