Inventor
TAN Wei Chean
JP7 patents
Patents
7 patentsUS12354830B2Jul 8, 2025
Sample image display system and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations59
US12169182B2Dec 17, 2024
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations59
US11747292B2Sep 5, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations59
US12368017B2Jul 22, 2025
Charged particle beam apparatus and focus adjusting method therefor
HITACHI HIGH TECH CORP0 citations58
US12046446B2Jul 23, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations49
US12051563B2Jul 30, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations46
US12525423B2Jan 13, 2026
Charged particle beam device
HITACHI HIGH TECH CORP0 citations45