Inventor
SHIBATA YUKINOBU
JP7 patents
Patents
7 patentsUS5757409AMay 26, 1998
Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus
HITACHI LTD25 citations92
US5557314ASep 17, 1996
Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus
HITACHI LTD20 citations92
US5250812AOct 5, 1993
Electron beam lithography using an aperture having an array of repeated unit patterns
HITACHI LTD25 citations90
US5424550AJun 13, 1995
Charged particle beam exposure apparatus
HITACHI LTD14 citations72
US5371373ADec 6, 1994
Electron beam lithography method and apparatus separating repetitive and non-repetitive pattern data
HITACHI LTD16 citations72
US5281827AJan 25, 1994
Charged particle beam exposure apparatus
HITACHI LTD5 citations72
US5206517AApr 27, 1993
Electron beam lithographic method
HITACHI LTD2 citations59