Inventor
TAKADA IKUO
JP3 patents
Patents
3 patentsUS5757409AMay 26, 1998
Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus
HITACHI LTD25 citations92
US5557314ASep 17, 1996
Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus
HITACHI LTD20 citations92
US5206517AApr 27, 1993
Electron beam lithographic method
HITACHI LTD2 citations59