Inventor
KONISHI TADAO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KONISHI TADAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS5424550AJun 13, 1995
Charged particle beam exposure apparatus
HITACHI LTD14 citations72
US5281827AJan 25, 1994
Charged particle beam exposure apparatus
HITACHI LTD5 citations72
US4221965ASep 9, 1980
Scanning type electron microscope
HITACHI LTD9 citations71
US5206517AApr 27, 1993
Electron beam lithographic method
HITACHI LTD2 citations59