Inventor
NORMAN JOHN A T
US20 patents
Patents
20 patentsUS5098516AMar 24, 1992
Processes for the chemical vapor deposition of copper and etching of copper
AIR PROD & CHEM143 citations98
US5322712AJun 21, 1994
Process for improved quality of CVD copper films
AIR PROD & CHEM72 citations96
US5094701AMar 10, 1992
Cleaning agents comprising beta-diketone and beta-ketoimine ligands and a process for using the same
AIR PROD & CHEM66 citations95
US5085731AFeb 4, 1992
Volatile liquid precursors for the chemical vapor deposition of copper
AIR PROD & CHEM120 citations95
US5144049ASep 1, 1992
Volatile liquid precursors for the chemical vapor deposition of copper
AIR PROD & CHEM63 citations94
US5273775ADec 28, 1993
Process for selectively depositing copper aluminum alloy onto a substrate
AIR PROD & CHEM36 citations92
US5221366AJun 22, 1993
Etching agents comprising β-diketone and β-ketoimine ligands and a process for using the same
AIR PROD & CHEM36 citations92
US5187300AFeb 16, 1993
Volatile precursors for copper CVD
AIR PROD & CHEM41 citations92
US5028724AJul 2, 1991
Synthesis of volatile fluorinated and non-fluorinated metal-beta-ketonate and metal-beta-ketoiminato complexes
AIR PROD & CHEM38 citations92
USRE35614ESep 23, 1997
Process for improved quality of CVD copper films
AIR PROD & CHEM13 citations74
US5008415AApr 16, 1991
Volatile fluorinated β-ketoimines and associated metal complexes
AIR PROD & CHEM11 citations74
US4950790AAug 21, 1990
Volatile fluorinated β-ketoimines and associated metal complexes
AIR PROD & CHEM7 citations74
US4735634AApr 5, 1988
Pillared cobalt complexes for oxygen separation
AIR PROD & CHEM9 citations73
US5319118AJun 7, 1994
Volatile barium precursor and use of precursor in OMCVD process
AIR PROD & CHEM17 citations72
US5062902ANov 5, 1991
Fluxing agents comprising β-diketone and β-ketoimine ligands and a process for using the same
AIR PROD & CHEM7 citations72
US5252733AOct 12, 1993
Volatile crown ligand β-diketonate alkaline earth metal complexes
AIR PROD & CHEM5 citations63
US4943673AJul 24, 1990
Novel metal-diketone absorbents for olefins
AIR PROD & CHEM6 citations62
US4877425AOct 31, 1989
Novel metal-diketone absorbents for carbon monoxide
AIR PROD & CHEM4 citations62
US4845254AJul 4, 1989
Novel metal-diketone absorbents for carbon monoxide or olefins
AIR PROD & CHEM3 citations62
US5009725AApr 23, 1991
Fluxing agents comprising β-diketone and β-ketoimine ligands and a process for using the same
AIR PROD & CHEM4 citations61