Inventor
TANAKA HIDEYA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA HIDEYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS5689749ANov 18, 1997
Apparatus for developing a resist-coated substrate
TOKYO ELECTRON LTD68 citations94
US6158075ADec 12, 2000
Apparatus and method for washing substrate
TOKYO ELECTRON LTD32 citations91
US5826130AOct 20, 1998
Apparatus and method for developing resist coated on substrate
TOKYO ELECTRON LTD29 citations90
US6059891AMay 9, 2000
Apparatus and method for washing substrate
TOKYO ELECTRON LTD53 citations89
US6379469B1Apr 30, 2002
Apparatus and method for washing substrate
TOKYO ELECTRON LTD13 citations72