Inventor
BARBER RENNIE
US4 patents
Patents
4 patentsUS6874510B2Apr 5, 2005
Method to use a laser to perform the edge clean operation on a semiconductor wafer
LSI LOGIC CORP27 citations90
US5942038AAug 24, 1999
Cooling element for a semiconductor fabrication chamber
LSI LOGIC CORP10 citations68
US5497727AMar 12, 1996
Cooling element for a semiconductor fabrication chamber
LSI LOGIC CORP13 citations68
US6869893B2Mar 22, 2005
Laminate low K film
LSI LOGIC CORP2 citations60