Inventor
USHIROGOUCHI TOHRU
JP3 patents
Patents
3 patentsUS5332648AJul 26, 1994
Potosensitive composition and method of forming a pattern using the same
TOSHIBA KK79 citations94
US6340552B1Jan 22, 2002
Photosensitive composition containing a dissolution inhibitor and an acid releasing compound
TOSHIBA KK6 citations72
US6306553B1Oct 23, 2001
Photosensitive composition and method of forming a pattern using the same
TOSHIBA KK2 citations61