Inventor
KNIGHT STEPHEN E
US6 patents
Patents
6 patentsUS6383719B1May 7, 2002
Process for enhanced lithographic imaging
IBM32 citations92
US5486267AJan 23, 1996
Method for applying photoresist
IBM24 citations92
US6278515B1Aug 21, 2001
Method and apparatus for adjusting a tilt of a lithography tool
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US6944578B2Sep 13, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
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US6917901B2Jul 12, 2005
Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus
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US6766507B2Jul 20, 2004
Mask/wafer control structure and algorithm for placement
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