Inventor
BALDWIN CRAIG T
US5 patents
Patents
5 patentsUS6431112B1Aug 13, 2002
Apparatus and method for plasma processing of a substrate utilizing an electrostatic chuck
TOKYO ELECTRON LTD86 citations96
US6367413B1Apr 9, 2002
Apparatus for monitoring substrate biasing during plasma processing of a substrate
TOKYO ELECTRON LTD95 citations96
US6596550B2Jul 22, 2003
Method for monitoring substrate biasing during plasma processing of a substrate
TOKYO ELECTRON LTD9 citations72
US6577113B2Jun 10, 2003
Apparatus and method for measuring substrate biasing during plasma processing of a substrate
TOKYO ELECTRON LTD12 citations72
US7314537B2Jan 1, 2008
Method and apparatus for detecting a plasma
TOKYO ELECTRON LTD3 citations55