Inventor

BIRKLE SIEGFRIED

DE67 patents

⚠️ This page may combine multiple inventors who share the name “BIRKLE SIEGFRIED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BIRKLE SIEGFRIED

SIEMENS AG

Working electrode for electrochemical enzymatic sensor systems

Method for dimensionally accurate structure transfer in bilayer technique wherein a treating step with a bulging agent is employed after development

Highly heat-resistant positive resists comprising end-capped hydroxypolyamides

Photostructuring process

Etch-resistant deep ultraviolet resist process having an aromatic treating step after development

Photostructuring method

Connection and build-up technique for multichip modules

Photocell

Metal insulator semiconductor field effect transistor

Method for anodizing aluminum materials and aluminized parts

Amorphous, hydrogenated carbon electroactive passivation layer

Planarizing dielectric

Fuel cell and use of iron-based alloys for the construction of fuel cells

Measurement element for determining a flow rate

Electrolyte for the electrodeposition of aluminum

Multilayer printed circuit boards and multichip-module substrates, with layers of amorphous hydrogenated carbon

Electrophotographic recording material and method for the manufacture thereof

Method and means for drying bulk goods

Electroplating apparatus particularly for electro-deposition of aluminum

Apparatus for electrolytic surface treatment of bulk goods

Apparatus for mass electroplating of bulk goods

Mixed polymers

Production of photolithographic structures

Method for producing a resist structure

Method for producing a resist structure

Radiation-curable liquid resin for secondary coating of lightwave guides

Capacitive moisture-sensor

Bath and method for anodizing aluminized parts

Device for electro-deposition of aluminum

Electroplating device

Device for electrodeposition of aluminum

Device for electrodeposition of aluminum

Device for the galvanic deposition of aluminum

Device for galvanic precipitation of aluminum

Apparatus for the galvanic deposition of aluminum

Protective layer for electroactive passivation layers

Method for the plasma deposition of hydrogenated, amorphous carbon using predetermined retention times of gaseous hydrocarbons

Method of producing relief structures for integrated semiconductor circuits

Method for the manufacture of resist structures

Radiation-sensitive resist composition comprising a diazoketone

Method of dry development utilizing quinone diazide and basic polymer resist with latent image intensification through treatment with silicon-organic compound in water

Surface-treating apparatus for agitatable material

Device for transporting agitatable material having a vibrator which is submerged in a liquid

Method for generating resist structures

Lapping device for surface enhancement of bulk material

Alkenylphenol and alkenylphenol ether copolymers

Apparatus for mass electroplating of bulk goods

Apparatus for electrolytic surface treatment of bulk goods

Copolymers

SIEMENS AKTINEGESELLSCHAFT

Photoresists which are suitable for producing sub-micron size structures