Inventor
TANOUE MITSUHIRO
JP8 patents
Patents
8 patentsUS6474986B2Nov 5, 2002
Hot plate cooling method and heat processing apparatus
TOKYO ELECTRON LTD71 citations95
US7836845B2Nov 23, 2010
Substrate carrying and processing apparatus
TOKYO ELECTRON LTD21 citations92
US7661894B2Feb 16, 2010
Coating and developing apparatus, and coating and developing method
TOKYO ELECTRON LTD21 citations92
US6815647B2Nov 9, 2004
Heat treatment unit and heat treatment method
TOKYO ELECTRON LTD18 citations92
US6534750B1Mar 18, 2003
Heat treatment unit and heat treatment method
TOKYO ELECTRON LTD39 citations92
US6450805B1Sep 17, 2002
Hot plate cooling method and heat processing apparatus
TOKYO ELECTRON LTD28 citations92
US6185370B1Feb 6, 2001
Heating apparatus for heating an object to be processed
TOKYO ELECTRON LTD44 citations91
US6551448B2Apr 22, 2003
Heat processing apparatus of substrate
TOKYO ELECTRON LTD21 citations90