Inventor

MORGENSTERN THOMAS

DE4 patents

⚠️ This page may combine multiple inventors who share the name “MORGENSTERN THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

3 patents

US6852639B2Feb 8, 2005

Etching processing method for a material layer

INFINEON TECHNOLOGIES AG7 citations68

US6984556B2Jan 10, 2006

Method of forming an isolation layer and method of manufacturing a trench capacitor

INFINEON TECHNOLOGIES AG3 citations57

US6855596B2Feb 15, 2005

Method for manufacturing a trench capacitor having an isolation trench

INFINEON TECHNOLOGIES AG6 citations51

SEMICONDUCTOR 300 GMBH & CO KG

1 patent

US6593242B2Jul 15, 2003

Process for planarization and recess etching of integrated circuits

SEMICONDUCTOR 300 GMBH & CO KG12 citations68