Inventor
WARD BETH A
US9 patents
⚠️ This page may combine multiple inventors who share the name “WARD BETH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS6893979B2May 17, 2005
Method for improved plasma nitridation of ultra thin gate dielectrics
IBM21 citations91
US7291568B2Nov 6, 2007
Method for fabricating a nitrided silicon-oxide gate dielectric
IBM13 citations81
US6893948B2May 17, 2005
Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size
IBM8 citations73
US6670263B2Dec 30, 2003
Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size
IBM9 citations73
US7109559B2Sep 19, 2006
Nitrided ultra thin gate dielectrics
IBM6 citations72
US6706644B2Mar 16, 2004
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors
IBM7 citations72
US7714366B2May 11, 2010
CMOS transistor with a polysilicon gate electrode having varying grain size
IBM0 citations51
US6909157B2Jun 21, 2005
Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors
IBM0 citations51