Inventor

ALEN PETRA

FI3 patents

Patents

3 patents

US6824816B2Nov 30, 2004

Process for producing metal thin films by ALD

ASM INT136 citations97

US6706115B2Mar 16, 2004

Method for preparing metal nitride thin films

ASM INT134 citations95

US7220451B2May 22, 2007

Process for producing metal thin films by ALD

ASM INT48 citations94