Inventor

YASAKA MITSUO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “YASAKA MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JAPAN SCIENCE & TECH CORP

1 patent

US6753499B1Jun 22, 2004

Method and apparatus for detecting anomalous discharge in plasma processing equipment using weakly-ionized thermal non-equilibrium plasma

JAPAN SCIENCE & TECH CORP54 citations87

RENESAS ELECTRONICS CORP

1 patent

US7974067B2Jul 5, 2011

Plasma processing apparatus and method of suppressing abnormal discharge therein

RENESAS ELECTRONICS CORP5 citations60