Inventor
HSIEH CHING CHENG
TW4 patents
Patents
4 patentsUS6147013ANov 14, 2000
Method of LPCVD silicon nitride deposition
MOSEL VITELIC INC30 citations87
US7004012B2Feb 28, 2006
Method of estimating thickness of oxide layer
MOSEL VITELIC INC5 citations55
US6880382B2Apr 19, 2005
Leakage detecting method for use in oxidizing system of forming oxide layer
MOSEL VITELIC INC2 citations55
US6492248B2Dec 10, 2002
Few-particle-induced low-pressure TEOS process
MOSEL VITELIC INC0 citations49