Inventor
YUN JU-YOUNG
KR11 patents
⚠️ This page may combine multiple inventors who share the name “YUN JU-YOUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS6849555B2Feb 1, 2005
Wafer processing apparatus and wafer processing method using the same
SAMSUNG ELECTRONICS CO LTD15 citations92
US6586340B2Jul 1, 2003
Wafer processing apparatus and wafer processing method using the same
SAMSUNG ELECTRONICS CO LTD19 citations92
US6955983B2Oct 18, 2005
Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer
SAMSUNG ELECTRONICS CO LTD9 citations73
US7211769B2May 1, 2007
Heating chamber and method of heating a wafer
SAMSUNG ELECTRONICS CO LTD2 citations62
US7384866B2Jun 10, 2008
Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer
SAMSUNG ELECTRONICS CO LTD1 citations51
US6951814B2Oct 4, 2005
Methods for forming a metal wiring layer on an integrated circuit device at reduced temperatures
SAMSUNG ELECTRONICS CO LTD1 citations51