Inventor
ABE MITSUGU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “ABE MITSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOMURA MICRO SCIENCE KK
3 patentsUS6187201B1Feb 13, 2001
System for producing ultra-pure water
NOMURA MICRO SCIENCE KK63 citations89
US5573662ANov 12, 1996
Apparatus for treatment of low-concentration organic waste water
NOMURA MICRO SCIENCE KK51 citations88
US7625262B2Dec 1, 2009
Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry
NOMURA MICRO SCIENCE KK6 citations58