Inventor · disambiguated record
Masaaki Ogitsu
Also filed as: OGITSU MASAAKI
2 granted patents·24 citations·filing 2000–2004
60Inventor score
Top patents by PatentIndex Score
2 records- 0174US6413151B2CMP slurry recycling apparatus and method for recycling CMP slurryLSI LOGIC CORP·Filed 2000·Granted Jul 2, 2002·18 cites·17 claims
- 0255US7625262B2Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurryNOMURA MICRO SCIENCE KK·Filed 2004·Granted Dec 1, 2009·6 cites·20 claims
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