P

Inventor

WEI ZIN-CHANG

TW9 patents
⚠️ This page may combine multiple inventors who share the name “WEI ZIN-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

3 patents
US10113233B2Oct 30, 2018

Multi-zone temperature control for semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US9105591B2Aug 11, 2015

Rotatable and tunable heaters for semiconductor furnace

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9023664B2May 5, 2015

Multi-zone temperature control for semiconductor wafer

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations62

TAIWAN SEMICONDUCTOR MFG

2 patents
US7732344B1Jun 8, 2010

High selectivity etching process for metal gate N/P patterning

TAIWAN SEMICONDUCTOR MFG26 citations90
US8834671B2Sep 16, 2014

Apparatus and method for controlling silicon nitride etching tank

TAIWAN SEMICONDUCTOR MFG0 citations50

WEI ZIN-CHANG

2 patents
US8409997B2Apr 2, 2013

Apparatus and method for controlling silicon nitride etching tank

WEI ZIN-CHANG11 citations78
US8536491B2Sep 17, 2013

Rotatable and tunable heaters for semiconductor furnace

WEI ZIN-CHANG2 citations60

CHANG CHUN-LIN

1 patent
US8404572B2Mar 26, 2013

Multi-zone temperature control for semiconductor wafer

CHANG CHUN-LIN40 citations95

HUNG KUN-KU

1 patent
US8277286B2Oct 2, 2012

Slurry dispenser for chemical mechanical polishing (CMP) apparatus and method

HUNG KUN-KU17 citations76