Inventor
CACOURIS THEODORE
US4 patents
⚠️ This page may combine multiple inventors who share the name “CACOURIS THEODORE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS7189647B2Mar 13, 2007
Sequential station tool for wet processing of semiconductor wafers
NOVELLUS SYSTEMS INC41 citations94
US8883640B1Nov 11, 2014
Sequential station tool for wet processing of semiconductor wafers
NOVELLUS SYSTEMS INC3 citations60
US8026174B1Sep 27, 2011
Sequential station tool for wet processing of semiconductor wafers
NOVELLUS SYSTEMS INC3 citations60