Inventor
PATEL SUKESH JANUBHAI
US16 patents
⚠️ This page may combine multiple inventors who share the name “PATEL SUKESH JANUBHAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS9424528B2Aug 23, 2016
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
TOKYO ELECTRON LTD11 citations84
US9396443B2Jul 19, 2016
System and method for learning and/or optimizing manufacturing processes
TOKYO ELECTRON LTD6 citations84
US8744607B2Jun 3, 2014
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
TOKYO ELECTRON LTD12 citations84
US10133265B2Nov 20, 2018
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations71
US9746849B2Aug 29, 2017
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TOKYO ELECTRON LTD3 citations70
US9405289B2Aug 2, 2016
Method and apparatus for autonomous identification of particle contamination due to isolated process events and systematic trends
TOKYO ELECTRON LTD2 citations60
US10228678B2Mar 12, 2019
Tool failure analysis using space-distorted similarity
TOKYO ELECTRON LTD1 citations59
US10635993B2Apr 28, 2020
System and method for learning and/or optimizing manufacturing processes
TOKYO ELECTRON LTD0 citations52
US10571900B2Feb 25, 2020
Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing
TOKYO ELECTRON LTD0 citations49
KAUSHAL SANJEEV
7 patentsUS8396582B2Mar 12, 2013
Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool
KAUSHAL SANJEEV61 citations97
US8725667B2May 13, 2014
Method and system for detection of tool performance degradation and mismatch
KAUSHAL SANJEEV30 citations92
US8190543B2May 29, 2012
Autonomous biologically based learning tool
KAUSHAL SANJEEV17 citations92
US9275335B2Mar 1, 2016
Autonomous biologically based learning tool
KAUSHAL SANJEEV11 citations83
US8954184B2Feb 10, 2015
Tool performance by linking spectroscopic information with tool operational parameters and material measurement information
KAUSHAL SANJEEV8 citations83
US8078552B2Dec 13, 2011
Autonomous adaptive system and method for improving semiconductor manufacturing quality
KAUSHAL SANJEEV16 citations83
US8723869B2May 13, 2014
Biologically based chamber matching
KAUSHAL SANJEEV8 citations78