Inventor

KARIU KOSUKE

JP3 patents

Patents

3 patents

US9105585B2Aug 11, 2015

Etching method

TOKYO ELECTRON LTD1 citations48

US9034698B2May 19, 2015

Semiconductor device manufacturing method

TOKYO ELECTRON LTD0 citations48

US9711371B2Jul 18, 2017

Method of etching organic film

TOKYO ELECTRON LTD0 citations33