Inventor
BECKERS JOHAN FRANCISCUS MARIA
NL7 patents
Patents
7 patentsUS11550234B2Jan 10, 2023
Object in a lithographic apparatus
ASML NETHERLANDS BV0 citations59
US10948825B2Mar 16, 2021
Method for removing photosensitive material on a substrate
ASML NETHERLANDS BV1 citations57
US12204252B2Jan 21, 2025
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations56
US11687007B2Jun 27, 2023
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations56
US10976196B2Apr 13, 2021
Sensor mark and a method of manufacturing a sensor mark
ASML NETHERLANDS BV0 citations55
US11774868B2Oct 3, 2023
Image sensor for immersion lithography
ASML NETHERLANDS BV0 citations51
US11143969B2Oct 12, 2021
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
ASML NETHERLANDS BV0 citations44