Inventor
STAS ROLAND JOHANNES WILHELMUS
NL4 patents
⚠️ This page may combine multiple inventors who share the name “STAS ROLAND JOHANNES WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS11143975B2Oct 12, 2021
Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off
ASML NETHERLANDS BV0 citations56
US10976196B2Apr 13, 2021
Sensor mark and a method of manufacturing a sensor mark
ASML NETHERLANDS BV0 citations55
US10620548B2Apr 14, 2020
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations30