Inventor
OKADA MOTOI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OKADA MOTOI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS11598007B2Mar 7, 2023
Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method
TOKYO ELECTRON LTD5 citations70
US12260548B2Mar 25, 2025
Abnormality detection apparatus and abnormality detection method
TOKYO ELECTRON LTD0 citations59
US11928810B2Mar 12, 2024
Abnormality detection apparatus and abnormality detection method
TOKYO ELECTRON LTD1 citations59
US12244972B2Mar 4, 2025
Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium
TOKYO ELECTRON LTD0 citations55
US8989477B2Mar 24, 2015
Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus
TOKYO ELECTRON LTD1 citations49
US12176227B2Dec 24, 2024
State determination device, state determination method, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations43
US9927373B2Mar 27, 2018
Substrate processing apparatus, monitoring device of substrate processing apparatus, and monitoring method of substrate processing apparatus
TOKYO ELECTRON LTD1 citations41