Inventor
LEUNG TOI YUE BECKY
US7 patents
Patents
7 patentsUS6576489B2Jun 10, 2003
Methods of forming microstructure devices
APPLIED MATERIALS INC85 citations97
US6902947B2Jun 7, 2005
Integrated method for release and passivation of MEMS structures
APPLIED MATERIALS INC89 citations96
US7078302B2Jul 18, 2006
Gate electrode dopant activation method for semiconductor manufacturing including a laser anneal
APPLIED MATERIALS INC28 citations91
US6830950B2Dec 14, 2004
Integrated method for release and passivation of MEMS structures
APPLIED MATERIALS INC27 citations91
US6666979B2Dec 23, 2003
Dry etch release of MEMS structures
APPLIED MATERIALS INC45 citations91
US7611976B2Nov 3, 2009
Gate electrode dopant activation method for semiconductor manufacturing
APPLIED MATERIALS INC3 citations61
US11915932B2Feb 27, 2024
Plasma etching of mask materials
APPLIED MATERIALS INC0 citations55