Inventor

THIBAULT LOUIS R

2 patents

Patents

2 patents

US4136434AJan 30, 1979

Fabrication of small contact openings in large-scale-integrated devices

BELL TELEPHONE LABOR INC28 citations78

US4323638AApr 6, 1982

Reducing charging effects in charged-particle-beam lithography

BELL TELEPHONE LABOR INC17 citations69