Inventor
HILDENBRAND RANDALL C
US10 patents
Patents
10 patentsUS4886570ADec 12, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC160 citations99
US4687542AAug 18, 1987
Vacuum processing system
TEXAS INSTRUMENTS INC138 citations98
US5248636ASep 28, 1993
Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
TEXAS INSTRUMENTS INC86 citations96
US5138973AAug 18, 1992
Wafer processing apparatus having independently controllable energy sources
TEXAS INSTRUMENTS INC108 citations96
US4822450AApr 18, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC56 citations96
US4836905AJun 6, 1989
Processing apparatus
TEXAS INSTRUMENTS INC117 citations94
US4816116AMar 28, 1989
Semiconductor wafer transfer method and arm mechanism
TEXAS INSTRUMENTS INC38 citations92
US4872938AOct 10, 1989
Processing apparatus
TEXAS INSTRUMENTS INC51 citations91
US4657620AApr 14, 1987
Automated single slice powered load lock plasma reactor
TEXAS INSTRUMENTS INC24 citations79
US4657618AApr 14, 1987
Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate
TEXAS INSTRUMENTS INC19 citations70