Inventor
TANIMOTO TAKUMA
JP3 patents
Patents
3 patentsUS5495115AFeb 27, 1996
Semiconductor crystalline laminate structure, forming method of the same, and semiconductor device employing the same
HITACHI LTD72 citations94
US5548138AAug 20, 1996
Semiconductor device with reduced tunnel resistance and circuitry using the same
HITACHI LTD35 citations92
US5401357AMar 28, 1995
Dry etching method
HITACHI LTD17 citations73