Inventor
FUJISHIRO FELIX H
US4 patents
⚠️ This page may combine multiple inventors who share the name “FUJISHIRO FELIX H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VLSI TECHNOLOGY INC
3 patentsUS5745990AMay 5, 1998
Titanium boride and titanium silicide contact barrier formation for integrated circuits
VLSI TECHNOLOGY INC48 citations90
US6007641ADec 28, 1999
Integrated-circuit manufacture method with aqueous hydrogen-fluoride and nitric-acid oxide etch
VLSI TECHNOLOGY INC9 citations72
US5493926AFeb 27, 1996
Method of identifying a weakest interface where delamination is most likely to occur in a multi-layer dielectric film stack
VLSI TECHNOLOGY INC7 citations65