Inventor
DENTY JR WILLIAM M
US10 patents
⚠️ This page may combine multiple inventors who share the name “DENTY JR WILLIAM M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6170429B1Jan 9, 2001
Chamber liner for semiconductor process chambers
LAM RES CORP233 citations98
US6277237B1Aug 21, 2001
Chamber liner for semiconductor process chambers
LAM RES CORP75 citations96
US7169231B2Jan 30, 2007
Gas distribution system with tuning gas
LAM RES CORP47 citations95
US7371332B2May 13, 2008
Uniform etch system
LAM RES CORP29 citations92
US7854820B2Dec 21, 2010
Upper electrode backing member with particle reducing features
LAM RES CORP38 citations91
US9234775B2Jan 12, 2016
Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber
LAM RES CORP6 citations72
US9093483B2Jul 28, 2015
Showerhead electrode assembly with gas flow modification for extended electrode life
LAM RES CORP0 citations51