Inventor
GRANT CASEY J
US13 patents
⚠️ This page may combine multiple inventors who share the name “GRANT CASEY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS6776171B2Aug 17, 2004
Cleaning of semiconductor wafers by contaminate encapsulation
IBM43 citations88
US7773159B2Aug 10, 2010
Switching system for signal monitoring and switch-back control
IBM9 citations82
US6670283B2Dec 30, 2003
Backside protection films
IBM15 citations81
US6992014B2Jan 31, 2006
Method and apparatus for etch rate uniformity control
IBM10 citations71
US7872692B2Jan 18, 2011
Structure for switching system for signal monitoring and switch-back control
IBM5 citations61
US6939408B1Sep 6, 2005
Method for surface preparation of workpieces utilizing fluid separation techniques
IBM3 citations55
US6884722B2Apr 26, 2005
Method of fabricating a narrow polysilicon line
IBM1 citations51
US7531059B2May 12, 2009
Cleaning of semiconductor wafers by contaminate encapsulation
IBM0 citations48
US7205216B2Apr 17, 2007
Modification of electrical properties for semiconductor wafers
IBM0 citations40
GRANT CASEY J
2 patentsUS8399181B2Mar 19, 2013
Methods of fabricating photomasks for improving damascene wire uniformity without reducing performance
GRANT CASEY J3 citations55
US8849440B2Sep 30, 2014
Manufacturing control based on a final design structure incorporating both layout and client-specific manufacturing information
GRANT CASEY J2 citations51