Inventor
MCAVEY JR KENNETH F
US7 patents
⚠️ This page may combine multiple inventors who share the name “MCAVEY JR KENNETH F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS7176119B2Feb 13, 2007
Method of fabricating copper damascene and dual damascene interconnect wiring
IBM13 citations91
US6776171B2Aug 17, 2004
Cleaning of semiconductor wafers by contaminate encapsulation
IBM43 citations88
US6939408B1Sep 6, 2005
Method for surface preparation of workpieces utilizing fluid separation techniques
IBM3 citations55
US9716010B2Jul 25, 2017
Handle wafer
IBM1 citations51
US8912091B2Dec 16, 2014
Backside metal ground plane with improved metal adhesion and design structures
IBM1 citations51
US7531059B2May 12, 2009
Cleaning of semiconductor wafers by contaminate encapsulation
IBM0 citations48