Inventor
SHARROW JOEL M
US8 patents
Patents
8 patentsUS6776171B2Aug 17, 2004
Cleaning of semiconductor wafers by contaminate encapsulation
IBM43 citations88
US6340601B1Jan 22, 2002
Method for reworking copper metallurgy in semiconductor devices
IBM26 citations87
US6670283B2Dec 30, 2003
Backside protection films
IBM15 citations81
US6356653B2Mar 12, 2002
Method and apparatus for combined particle location and removal
IBM16 citations80
US6992014B2Jan 31, 2006
Method and apparatus for etch rate uniformity control
IBM10 citations71
US6939408B1Sep 6, 2005
Method for surface preparation of workpieces utilizing fluid separation techniques
IBM3 citations55
US6884722B2Apr 26, 2005
Method of fabricating a narrow polysilicon line
IBM1 citations51
US7531059B2May 12, 2009
Cleaning of semiconductor wafers by contaminate encapsulation
IBM0 citations48